@Михаил Орёл у вас для начала ошибка в параметре
4016#7=1 а в руководстве указано что при использовании aiCz sensor это недопустимо
RFCHK3 Setting of the function of detecting the one-rotation signal again each time position
control mode is set.
0 : The one-rotation signal is not detected each time the operating mode changes.
Once the one-rotation signal has been detected, it is not detected again until the
power goes off.
1 : The one-rotation signal is detected each time the operating mode changes. NOTE
If the iCZ sensor (serial) is used, this parameter is invalid